Kenosha Reuse Discussion Board > WAUKEEGAN, IL
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> Cpa 9900 in line dc magnetron sputtering system
Cpa 9900 in line dc magnetron sputtering system
CPA 9900 In Line DC Magnetron Sputtering System
Basic System Manual Operation:
The CPA 9900 in line sputter pallets are manually lowered onto the transport mechanism and moved through the process chamber at a fixed speed. After the first pallet reaches the chamber at the far exit end, it will be manually raised into the stacking system and ready for the next pallet to be completed. After processing all 10 pallets, if needed, the pallets can be sent back through for additional processing. Once complete, the load locks and process chamber are vented to remove processed pallets and the entire operating routine may be repeated.
A CPA Model 9900 Sputtering System OEM Brochure can be downloaded for additional information (not all of this information may apply to this particular CPA 9900 sputtering system).
* Process chamber has three cathode positions, sputter down configuration
* System includes 2 each 10" long X 4" wide DC Magnetron cathode assemblies and 1 each circular DC Magnetron cathode assemblies with adaptor flange
* NOTE: 1 Each 4" x 10" retangular cathode is installed in the system. The other 2 cathode assemblies are not installed (see photos)
* System utilizes a 5 KW DC Magnetron MDX 5 Advanced Energy sputtering power supply, but it has been removed from the system is not available/not included (these are readily available on the used equipment market)
* This CPA 9900 is not equipped for RF sputtering or RF sputter etch
* One entry load lock and one exit load lock chamber, each with capacity of 10 nominal 8.5" X 8.5" pallets
* One Varian Model VHS-6 diffusion pump with LN2 cold trap with high vac valve
* Gas control system consisting of:
* MKS PDR-C-1B power supply readout
* 2 Each Vacuum General Model FS6-21 100 SCCM MFC
* 2 Each Vacuum General Model 80-4 flow controllers
* Granville Philips Model 270 Ionization gauge control
* CPA automatic valve sequencer
* No mechanical pump is included
* 1 CPA 9900 In Line DC Magnetron Sputtering System with accessories as listed above
