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Edwards boc ILS70 dry semiconductor vacuum pump
The BOC Edwards iLs70 iLs 70 Semiconductor Dry Vacuum Pump System Rebuilt
The iLs70 iLs 70 Dry Vacuum Pumps are ideally suited to loadlock, transfer chamber, Physical Vapor Deposition PVD, SEM and similar duties. The S in the product name is for Smart which refers to the use of brushless DC drive and motor technology to drive the vacuum pump and (if fitted) booster pump mechanism. This technology provides reduction in the power consumption of the vacuum pump, and allows for speed control of either mechanism if required.
The iLs70 system has an LCDP70 dry pump and enclosed water cooled motors. iLs70 Series pumps feature shaft seal nitrogen purge capability ideal for light duty applications such as dielectric etch. This system is fully enclosed, and includes seismic restraints. A PDT, available as an accessory, enables you to manually operate the iLs system and to display its status. Edwards iLs70 reference part number A53333945.
High reliability, resulting in low service costs
Comply with CE, SEMI S2 & UL
Physical Vapor Deposition PVD
Every Edwards iLs70 iLs 70 subfab dry vacuum pump we sell goes through a rigorous rebuild process at our Albuquerque, New Mexico (NM) location. As each pump is rebuilt they are fully dismantled and all parts are decontaminated and inspected. Damaged or worn parts are replaced. All bearings, o-rings, seals, and gaskets are replaced. Rebuilt pumps are attached to our computer controlled pressure diagnostics system where their performance is monitored for 72-hours under varying load. Pumps are leak tested to ensure safety during operation. All sensors are tested and the final rebuilt Edwards iLs70 subfab vacuum dry pump is cleaned and painted as required. We offer rebuild subfab services to rebuild you Edwards iLs70 iLs 70 dry vacuum pumps. Please call our office at (***) 872-0037 for more information about our subfab rebuild service. For detailed specs and instruction manual on this Edwards iLs70 iLs 70 subfab pump see AVAILABLE DOWNLOADS below.
Edwards iLs70 iLs 70 Specifications Sheet.pdf
Product: The BOC Edwards iLs70 iLs 70 Semiconductor Dry Vacuum Pump System Rebuilt
