Kenosha Reuse Discussion Board > SALEM, WI
> Commercial
> Electrical
> Refurbished
> Mks astex atronex reactive gas generator
Mks astex atronex reactive gas generator
MKS Astex ATRONex REACTIVE GAS GENERATOR
http:// /docs/UR/ASTEXax7685DS.pdf
ex reactive gas generator is our highest output, self-contained reactive species source for chamber cleaning and other reactive gas applications. The ASTRONex reactive gas generator uses patented Low-Field-Toroidal plasma technology to efficiently dissociate input gas to produce downstream reactive chemistries. The unique high power design effectively dissociates alternative gases such as C3F8 and CF4. The increased flow capability provides sufficient reactive gas production for cost-effective use of these alternative process gases.
