Kenosha Reuse Discussion Board > SALEM, WI
> Commercial
> Automative
> New
> March px-1000 batch plasma cleaner/asher/etcher/rie
March px-1000 batch plasma cleaner/asher/etcher/rie
March PX-1000 Batch Plasma Cleaner/Asher/Etcher/RIE
This March PX-1000 is used, tested, and operates correctly. It is in generally good condition with scratches and wear consistent with normal operation. There are NO vacuum leaks.
Options: This is a two-gas model; it can be upgraded to four-gas.
Pump: A vacuum pump is NOT included; please contact us for availability of pumps. We offer both Fomblin and hydro prep. All pumps are sold rebuilt with warranty conditional upon use.
RF Generator: ENI ACG-6B (air-cooled, 110/220VAC selectable.) If you need more power contact us; we may have other generators available.
Ultimate vacuum: 6mT with our Leybold D65B
Chamber interior dimensions, inches: 16.25w x 17h x 20d
Accessories: There are no additional accessories included other than a pneumatic vacuum valve for evacuating the chamber. This valve is operated by the PX-1000 internal microprocessor. The shelves, RF generator and RF cable are of course included. We do not have a control cable for the RF generator; it is not strictly necessary.
Condition: Overall excellent with normal signs of use; outer door is missing; feet are missing, shelves shown are included. There are three grounded shelves and three hot electrodes. The shelves are heavily worn but still function correctly. Base pressure was 6mT as tested; the chamber was helium-leak tested and all leaks were repaired. The RF feedthroughs were rebuilt. The door seal is in good condition.
Photos: Please examine the photos carefully. The chamber is shown in operation with 47sccm N2 process gas at a pressure of 427mT.
You will receive the same chamber and RF generator shown in the photos. No other equipment is included in this sale.
Contact: Please contact us with your questions.
