Kenosha Reuse Discussion Board > RACINE, WI
> Commercial
> Mechanical
> Refurbished
> No Warranty
> Asml svg 90-s i-line coater/developer track 200MM
Asml svg 90-s i-line coater/developer track 200MM
ASML SVG 90-S I-Line Coater/Developer Track 200mm Wafers
* 4 serial arms and 1 90SE serial arm
* Local exhausted cabinet locations
* Floor is solid SS spill containment with overflow sensors
* Control Module on CES (left or right-integrated)
* Rear-pull interface for Nikon B11/12 stepper
* Coater/Developer direct floor drain (Tee in cabinet)
* Full/clogged drain sensor on each coater
* Full SEMI S2-93 Containment for solvent/pump drawer enclosures, bulkhead
* Facility sensors for vacuum generators, DI water and caustic exhaust
* Photoresistant Temperature control
* Air Temp/Humidity control
* Dispense line ID (nozzle tip=3/16")
* 1 SS non-coated 3 gallon un-pressurized vessel with Kalrez o-rings and 4 liquid level sensors
* 0.1 m solvent filter per canister
* TEBR, BEBR, SVB-25cc Millipore unfiltered pump (subject to availability)
* Solvent filter between bulk fill valve and Canister
* Air Temperature/Humidity Controller
* High flow(2 stream) nozzle on center
* 1 SS Tefzel-coated 3 gallon pressurized canister with Kalrez o-rings and 4 liquid level sensors
* Vacuum Bake Ovens, stacked-quantity 6
* Vapor Prime Ovens, stacked-quantity 2
* Quick disconnects HMDS canister (no exposure)
* Air Venturi, 2 modules/Venturi
* SS, non-coated, 2 gallon, Kalrez o-rings, 2 level sensors, DOT canisters in chemical cabinets
