Kenosha Reuse Discussion Board > KENOSHA, WI
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> Schlumberger ivs 120 metrology overlay verification
Schlumberger ivs 120 metrology overlay verification
SCHLUMBERGER IVS 120 Metrology System IVS 120 optical CD and Overlay metrology system
120VAC 1Phase 50/60 Hz 20 Amps
This is our last unit. AS you can see this unit is nice. Pulled from a working environment.
We also have a IVS 120 in inventory if you are interested.
Schlumberger Verification Systems' includes the most complete e-beam modeling undertaken for a CDSEM to create a unique
design allowing for measurements as low at 100eV and to ensure outstanding long term stability and collection efficiency.
The IVS 135 continues to provide measurement precision, even on the newest and most difficult layers, including shallow trench isolation (STI) and tungsten-plug chemical mechanical polishing (CMP) processes with small step heights within a layer and high step heights between layers with high degrees of process variation.
The system's combination of optics and spatial filters enables consistent system performance across
diverse applications and processes.
The system utilizes the company's Adaptive RG metrology software to reduce ramp-up time, and assure measurement success and precision on STI processes.
A combination of the proprietary FSF focus system and the tool's new laser focusing system provides both fast and accurate measurements of overlay features, the company said.
For more Information (***)-642-6698
