Kenosha Reuse Discussion Board > KENOSHA, WI
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> No Warranty
> Comdel CB5000 rf generator, 5 kw, novellus 27-335415-00
Comdel CB5000 rf generator, 5 kw, novellus 27-335415-00
Frequency: Any fixed frequency from 13.56 to 60 MHz, standard
Frequency stability: +/- 0.005%
Analog power command: 0-10 VDC for 0 to maximum output
Power linearity: < 2% of setting at power levels above 10% of rated power
Power repeatability: +/- 1% of setpoint into a 50-Ohm load
Control I/O connector: Standard: 15-pin subminiature D type (female)
Optional: 25-pin subminiature D type (female)
Harmonic distortion: Less than -35 dBc
Reflected power limit: 20% of full scale typical
