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Varian triode ion pump vacion 500 vacuum 8" conflat


Varian Triode Ion Pump VacIon 500 Vacuum 8" Conflat
Varian Triode Ion Pump VacIon 500 Vacuum 8' Conflat
Use the links below to View More Images of the Varian Triode Ion Vacuum Pump 8" Conflat CF Flange
Varian Triode Ion Pump 8" Conflat Flange
In a Triode VacIon pump the cathode is made of an open grid arrangement and is
powered with negative high voltage, while the anode assembly is grounded.
This configuration allows pumping gases at relatively high pressures.
General Description of the VacIon Pump
The Varian VacIon Plus 500 pumps are ion pumps and are available in four types:
* Triode (This is the unit be sold)
They operate in the pressure range from 10-2 to below 10-11 Torr (mbar). Virtually all
gases and vapors can be pumped successfully with the ion pump. The pumping
speed will vary depending on the system pressure, the gas type, and the applied
operating voltage. The latter can be optimized using Varian controllers to achieve
the lowest possible operating pressure.
The VacIon Plus Triode and StarCell pumps allow starting from as high as 5x10-2 Torr
(6.6x10-2mbar), because ions are prevented from bombarding the system and pump
walls at starting pressures, and have high speed for inert gases. The VacIon
Plus Diode and Noble Diode pumps require a lower starting pressure
(i.e. 10-3 Torr(mbar)). The Diode contains more titanium than triode pumps, and
thus has a higher hydrogen capacity and longer life. The tantalum in the
Noble Diode pump enhances the noble gas pumping capacity, although it
somewhat reduces the high getterable gas pumping speed that the standard
diode pump provides. The VacIon Plus StarCell is the latest variation of the
Triode configuration. Its patented design makes this ion pump the only one that can
handle a high amount of Noble Gases (better than Noble Diode and Triode)
and Hydrogen (comparable to the Diode). A positive polarity, high voltage supply is
required to operate Diode and Noble Diode pumps. A negative
polarity high voltage supply is required to operate Triode and StarCell pumps
since the anodeis grounded and the cathode is held at negative potential.
The inlet ConFlat flange is a 8 (NW 150). The pump body can be configured to
meet optional requirements including:
* Pumping Speed: 500 l/s (depending on gas)
This unit is on the factory skid (pallet) with the
Varian Factory inspection tag still on the unit & it
appears that is has never been installed (came
out of spare parts storage area in semiconductor facitlity)



Varian triode ion pump vacion 500 vacuum 8