Kenosha Reuse Discussion Board > WAUKEEGAN, IL
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> Mks 947 convection enhanced pirani w/ pressure gauge
Mks 947 convection enhanced pirani w/ pressure gauge
1.0 x 10-3 to 1.0 x 10+3 Torr measurement range for rough to medium vacuum applications
Fewer controls for simplified operation and lower cost
LED digital display for wider angle viewing and visibly clearer, unmistakable readings
Rapid responsiveness for applications in which speed is important
Two independent relay set points are standard for process control
LED set point status indicators
Sensor gives highly reliable and repeatable pressure measurements
Gas-type sensitivity useful for leak detection
CE Compliant with EMC Directive 89/336/EEC and Low Voltage Directive 72/23/EEC
when used with a shielded sensor
With a wide measurement range of 10-3 to 10+3 Torr, the HPS Series 947 Convection-
Enhanced Pirani Controller is ideal for rough to medium vacuum applications. This includes
measurement of roughing and foreline pressures, activation of high vacuum sensors, or
start-up of a system process with the standard relay set points. The Series 947 Controller is not only suitable for all vacuum industrial applications such as semiconductor or food processing, but also analytical applications and research. It is useful as either a small system controller or as a module in more sophisticated pressure control
Series 947 Convection-Enhanced Pirani Controller
An analog output signal proportional to pressure is standard and is accessible from the rear of the controller. Processes are controlled with two independent relay set points that are standard on this single-channel controller. The relays can be set to trip anywhere within the controller s set point range. All of the operating controls are conveniently accessible from the front panel of the controller, including the power on-off switch. Adjust set points from the front panel while viewing the large, easy-to-read display. Set point activation is shown with red LED indicators. Set points can be checked at any time with no break in process control. Atmosphere and zero adjustment potentiometers are also located on the front panel for quick controller calibration when interchanging sensors. The 947 is ready for benchtop use or can easily be mounted in a standard DIN panel cutout. Installation is quick and easy with the optional mounting kit.
